Large-area nanoimprint lithography： processes and device applications
نویسندگان
چکیده
منابع مشابه
Soft UV Nanoimprint Lithography and Its Applications
Large-area nanopatterning technology has demonstrated high potential which can signifi‐ cantly enhance the performance of many devices and products, such as LEDs, solar cells, hard disk drives, laser diodes, display, etc [1]. For example, nano-patterned sapphire substrates (NPSS) and photonic crystals (PhC) have been considered as the most effective approaches to improve the light output effici...
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Nowadays, nanodevices like small fluidic channels, semiconductor lasers, nano contacts for solar cells, nano magnets or nano antennas for infrared detection (THz) are of great interest. The applications for these devices extend the fields of e.g. energy, computational or medical sciences. For example, by arranging nano dots consisting of a magnetic material, logical circuits can be designed whi...
متن کاملNanoimprint Lithography
The Nanoimprint lithography (NIL) is a novel method of fabricating micro/nanometer scale patterns with low cost, high throughput and high resolution (Chou et al., 1996). Unlike traditionally optical lithographic approaches, which create pattern through the use of photons or electrons to modify the chemical and physical properties of the resist, NIL relies on direct mechanical deformation of the...
متن کاملFabrication of large area 100 nm pitch grating by spatial frequency doubling and nanoimprint lithography for subwavelength optical applications
In this article we report on the fabrication of 100 nm pitch gratings over a large area ~;10 cm! using a simple, low-cost, fast process. This method includes ~1! generation of the grating pattern using interferometric lithography and spatial frequency doubling and ~2! pattern replication using nanoimprint lithography. The form birefringence of a 100 nm pitch Si grating was studied using ellipso...
متن کاملLarge-area zinc oxide nanorod arrays templated by nanoimprint lithography: control of morphologies and optical properties.
Vertically aligned, highly ordered, large area arrays of nanostructures are important building blocks for multifunctional devices. Here, ZnO nanorod arrays are selectively synthesized on Si substrates by a solution method within patterns created by nanoimprint lithography. The growth modes of two dimensional nucleation-driven wedding cakes and screw dislocation-driven spirals are inferred to de...
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ژورنال
عنوان ژورنال: Guangxue jingmi gongcheng
سال: 2022
ISSN: ['1004-924X']
DOI: https://doi.org/10.37188/ope.20223005.0555